The Global Standard of Plasma Gas Scrubber

YPS-04AMP

Environmentally complete decomposition and treatment system of hazardous PFCs gases used in semiconductor & LCD manufacturing industry, by using DC Thermal Plasma.
Youngjin IND’s High-plasma Scrubber can decompose PFCs Gases(greenhouse gases)including flammable, Corrosive and toxic gases generated from the semiconductor & LCD manufacturing process equipment by using DC Thermal Plasma.

  • Applicable Areas

    For dealing with cleaning gas in semiconductor & LCD manufacturing process

  • Apply Gas

    All process gas including PFCs gas

Product Specifications

Item YPS-04AMP
TYPE PLASMA WET
Dimension 900 x 1000 x 2030
Capacity 600LPM
Weight 650 kg
Inlet NW50 X 4Port
Outlet MF100 X 1Port
Drain Power Drain
  • Features of Product

    Microwave+ArcPlasma

    High decomposition efficiency in treating PFCs gases

    Automatic anti-clogging pressure control in Scrubber(PLC Control)

    Easy installation & cost-effective management/maintenance

    Preventing CO2 generation(No need of fuel gas)

  • Process & Gas Applied

    Process:All process for manufacturing semiconductors, LCD/OLED

    Gas:All manufacturing process-related to gas treatment including PFCs

Features of Product Component

  • Thermal plasma Decomposition
    - Perfect decomposition of toxic gases in high-temperature
      Thermal Plasma
    Spray Quenching / Absorption
    - Excellent removal of by-products through spray quenching
    Auto Power Drain
    - Drain wastewater smoothly
    Gas Vent
    - Minimized Exhaust of powder, water & moisture
    Pressure Control
    - Measure the accurate pressure and powder clogging status
      through PID-type pressure
  • Auto Control System
    - PLC-based touch screen display
    - Auto/Manual modes & easy control
    - Demonstrating errors & recording history error log 
    - Fast-responding & highly accurate PLC Control
    By-Pass Function
    - Automatic gas-flow control by 3-way pneumatic valves
    Large Capacity
    - Improved treating PFCs gases by more than 2 times to
      existing equipment
    Using Microwave
    - Helping high decomposition efficiency in treating PFCs gases

Product Specification

Model Name Dimension [W x D x H] Capacity(Ipm) Inlet Q’ty[EA] Applicable Process Remarks
YPS-04AMP 900 x 1000 x 2030 600 4 Etch, CVD, T/F For wafer process

Utility Specification

Cabinet Dimension(mm) WIDTH DEPTH HEIGHT
900 1000 2030
POWER Voltage AC 208V
PHASE 3Phase
Current 75A, 50~60Hz, 4lines
Max. Capacity 600LPM
UTILITY SIZE TYPE FLOW(LPM) PRESSURE(PSI)
GAS 1 GN2 3/8” SUS 15 ~ 30 50 ~ 85
2 CDA 3/8” SUS 0(V/V Driving) 50 ~ 85
WATER 3 PCW IN 3/4” SUS 22 ~ 25 50 ~ 71
4 PCW OUT 3/4” SUS 22 ~ 25 50 ~ 71
5 NPW 3/8” SUS 0.5~2 35~71
EXHAUST 6 CABINET MF100 SUS 600
USER GAS 7 INLET NW50 SUS 300
8 OUTLET MF100 SUS 600
9 BY-PASS NW50 SUS 300
DRAIN 11 POWER 1” CPVC Use Forced Drain

TAGET ABATEMENT GAS

PFC gases : NF3, SF6, CF4, C2F6, C3F8, etc.

Flammable gases : SIH4, TEOS, H2, PH3, etc.

Water Soluble gases : BCL3, Cl2, HF, HCl, NH3, etc.